CVD of III-Vs
Consulting services in III-V Chemical Vapor Deposition
include equipment and process modeling of Metalorganic Vapor Phase Epitaxy (
MOVPE) and Molecular
Beam Epitaxy (
MBE) of conventional III-V semiconductor materials and group III-Nitrides as well as
of Hydride Vapor Phase Epitaxy (
HVPE) of group III-Nitrides. The consulting is based on advanced
models of the underlying physical and chemical phenomena and specific software tools. The simulations
cover the whole range of length and time scales involved into deposition process - from reactor flow
dynamics to adatom kinetics on the growing surfaces.